Process for preparing semiconductor device by use of a flattenin

Details Process for preparing semiconductor device by use of a flattenin Process for preparing semiconductor device by use of a flattenin

1991-09-05

1993-09-07

Hearn, Brian E.

Fishing, trapping, and vermin destroying

437 33, 437 46, 148DIG123, H01L 21225

Patent

active

052428583

ABSTRACT:
A process for preparing a semiconductor device comprises exposing at least a part of the main surface of a semiconductor substrate, forming a layer comprising the same main component as the above substrate, forming a flattening agent layer on the surface of said layer, removing the above layer and the flattening agent layer at the same time and injecting an impurity after said removing step.

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