Method of making CCD imagers

Details Method of making CCD imagers Method of making CCD imagers

1981-08-31

1983-08-02

Roy, Upendra

Metal treatment

Compositions

Heat treating

29571, 29576B, 148187, 357 24, 357 91, G11C 1928, H01L 2714, H01L 21263

Patent

active

043964389

ABSTRACT:
The preferred embodiment of the invention disclosed herein provides a CCD imager with reduced striation contrast in its displayed image. The wafer on which the imager is to be formed is lightly doped with atoms of one conductivity type. Before forming the various regions of the imager in the wafer, a layer is first doped with atoms of the same conductivity type so as to have a substantially uniform lateral concentration. This is preferably accomplished by ion implantation and diffusion techniques. Thereafter, an imager is formed in this layer in accordance with any desired technique.

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