Computer-controlled individual chip management system for proces

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364490, 364491, 437 54, G05B 1918

Patent

active

054484880

ABSTRACT:
Chips formed on respective wafers are numbered. A map in which chip positions are correlated with chip numbers is created. A process is specified for each individual chip. A host computer creates processing information from inputted lot information for each individual chip and supplies the created processing information to a processing apparatus. A terminal for receiving various kinds of information, a line terminal, a processing information storage means for storing processing information, and a line interior information storage means are connected to the host computer. Also, a chip-managing computer is connected to the host computer. This chip-managing computer creates maps of chips formed on wafers and creates map information in which device information is correlated with chip numbers assigned to respective chips. A chip information storage means for storing the map information is connected to the chip-managing computer.

REFERENCES:
patent: 3842491 (1974-10-01), Depuy et al.
patent: 4343877 (1982-08-01), Chiang
patent: 4571685 (1986-02-01), Kamushida
patent: 4967146 (1990-10-01), Morgan et al.

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