Particle detection system with reflective line-to-spot collector

Details Particle detection system with reflective line-to-spot collector Particle detection system with reflective line-to-spot collector

1993-03-22

1995-09-05

Limanek, Robert P.

Optics: measuring and testing

By monitoring of webs or thread

For flaws or imperfections

356446, 356432, 356237, 356376, G01B 902, G01B 1124, G01N 2188

Patent

active

054483646

ABSTRACT:
The surface inspection system has a scanning head for scanning the laser beam along a predetermined scan line across the surface of an article. A collector receives the light reflected from the article surface along the scan line. The collector has a first mirror position for receiving light reflected from the article surface, a second mirror oriented with respect to the first mirror to receive light reflected from the first mirror, and the first and second mirrors being configured and oriented so as to concentrate the reflected light from a line into a spot. A photodetector is positioned for receiving the thus formed spot of light. The method of inspecting the surface of an article includes the steps of scanning a laser beam along a predetermined scan line across the surface of the article, collectively receiving the light reflected from the article surface along the scan line with a plurality of mirrors so as to concentrate the reflected light from a line into a spot.

REFERENCES:
patent: 3575668 (1971-04-01), Smith
patent: 3663824 (1972-05-01), Blaisdell et al.
patent: 3748014 (1973-07-01), Belser
patent: 3782803 (1974-01-01), Buck
patent: 3790287 (1974-02-01), Cuthbert et al.
patent: 3825325 (1974-06-01), Hartley et al.
patent: 3843890 (1974-10-01), Anthony, Jr. et al.
patent: 3900265 (1975-08-01), Merien et al.
patent: 3961838 (1976-06-01), Zanoni
patent: 3973833 (1976-08-01), Lawson
patent: 4054361 (1977-10-01), Noguchi
patent: 4108533 (1978-08-01), Sick et al.
patent: 4116527 (1978-09-01), Sick
patent: 4158507 (1979-06-01), Himmel
patent: 4213157 (1980-07-01), DeBenedictis et al.
patent: 4248537 (1981-02-01), Sick
patent: 4264208 (1981-04-01), Haberl et al.
patent: 4314763 (1982-02-01), Steigmeier et al.
patent: 4321628 (1982-03-01), Crean
patent: 4355860 (1982-10-01), Lavallee et al.
patent: 4360275 (1982-11-01), Louderback
patent: 4376583 (1983-03-01), Alford et al.
patent: 4378159 (1983-03-01), Galbraith
patent: 4423331 (1983-12-01), Koizumi et al.
patent: 4568835 (1986-02-01), Imamura et al.
patent: 4601576 (1986-07-01), Galbraith
patent: 4630276 (1986-12-01), Moran
patent: 4655592 (1987-04-01), Allemand
patent: 4693601 (1987-09-01), Dabelstein et al.
patent: 4732473 (1988-03-01), Bille et al.
patent: 4775238 (1988-10-01), Weber
patent: 4795911 (1989-01-01), Kohno et al.
patent: 4806774 (1989-02-01), Lin et al.
patent: 4866288 (1989-09-01), Weber
patent: 4875780 (1989-10-01), Moran et al.
patent: 4893932 (1990-01-01), Knollenberg
patent: 4898471 (1990-02-01), Stonestrom et al.
patent: 5030842 (1991-07-01), Koshinaka et al.
patent: 5046847 (1991-09-01), Nakata et al.
patent: 5076692 (1991-12-01), Neukermans et al.
patent: 5084883 (1992-01-01), Khalid et al.
patent: 5088105 (1992-02-01), Seifres et al.
patent: 5127726 (1992-07-01), Moran
patent: 5220403 (1993-06-01), Batchelder et al.
patent: 5278012 (1994-01-01), Yamanaka et al.
Displays Technology & Applications, Topic--Optics and Laser Technology, Article--Automatic inspection of silicon wafers, From NASA technical support package for technical brief vol. 4, No. 3. NASA, George C. Marshall Space Flight Centere .COPYRGT.1980 IPC Business Press, pp. 319-320.
Journal--Discussions Section, Abstract--Design criteria and performance characteristics of an optical system capable of detecting imperfections on the polished surfaces of semiconductor materials. Authored by J. J. Ruiz, C. S. Williams, and F. A. Padovani. Published Dec., 1974, pp. 689-691.

Affiliated with

Also associated with

Rating

Particle detection system with reflective line-to-spot collector does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Particle detection system with reflective line-to-spot collector, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Particle detection system with reflective line-to-spot collector will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-476779