Photocopying – Projection printing and copying cameras – Illumination systems or details
Patent
1994-07-14
1995-09-05
Wintercorn, Richard A.
Photocopying
Projection printing and copying cameras
Illumination systems or details
355 53, G03B 2772, G03B 2742
Patent
active
054483360
ABSTRACT:
A projection exposure apparatus having an illuminating system for irradiating a mask having a pattern with illuminating light and a projection optical system for taking in light emanating from the pattern of the mask and for projecting an image of the pattern on a photosensitive substrate. The projection exposure apparatus further includes a phase plate disposed on or near a Fourier transform plane in an image-forming optical path between the mask and the photosensitive substrate so that the amplitude of light passing through a circular region of radius r.sub.1 which is centered at an optical axis of the projection optical system on the Fourier transform plane or a plane near it and the amplitude of light passing through an outer region while lies outwardly of the circular region are made different in sign from each other by the phase plate, and a movable member for moving an image-forming plane of the projection optical system and the photosensitive substrate relative to each other along the optical axis of the projection optical system when the image of the mask pattern is projected on the photosensitive substrate. The radius r.sub.1 and the ratio t of the amplitude of light passing through the circular region to the amplitude light passing through the outer region are determined so as to satisfy the following condition:
REFERENCES:
patent: 5208629 (1993-05-01), Matsuo et al.
patent: 5311249 (1994-05-01), Kamon et al.
patent: 5323208 (1994-06-01), Fukuda et al.
patent: 5329336 (1994-07-01), Hirano et al.
patent: 5345292 (1994-09-01), Shiozawa et al.
patent: 5348837 (1994-09-01), Fukuda et al.
Nikon Corporation
Wintercorn Richard A.
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