Method of forming thin zinc oxide film, and method of producing

Details Method of forming thin zinc oxide film, and method of producing Method of forming thin zinc oxide film, and method of producing

1999-02-03

2000-10-17

Bowers, Charles

Semiconductor device manufacturing: process

Making device or circuit responsive to nonelectrical signal

Responsive to electromagnetic radiation

136256, 205123, H01L 2100

Patent

active

061330612

ABSTRACT:
The present invention provides a method of forming a thin film of zinc oxide on a conductive substrate by electrodeposition from an aqueous solution, which is capable of preventing film deposition on the back surface of the substrate. More specifically, a film deposition-preventing electrode for preventing film deposition on the back surface of the substrate is provided in an aqueous solution containing nitrate ions, and a current is supplied in such a manner that a potential relationship of "a counter electrode>the substrate>the film deposition-preventing electrode" is obtained. This method can be applied to a process for preparing a solar cell, thereby improving short circuit current density, photoelectric conversion efficiency, production yield and durability of the solar cell.

REFERENCES:
patent: 5322614 (1994-06-01), May et al.
patent: 5453135 (1995-09-01), Nakagawa et al.
patent: 5804466 (1998-06-01), Arao et al.
Y. Inoue et al., "Optical Confinement Effect in a-SiGe Solar Cells on Stainless Steel Substrates", Ext. Abs. 51.sup.st Autumn Meeting of Japan Soc. Appl. Phys., 29 p-MF-2, p. 747 (1990).
H. Sannomiya et al., "a-SiC/a-Si/a-SiGe Multi-Bandgap Stacked Solar Cells with Bandgap Profiling", Tech. Dig. Int'l. PVSEC-5, P-IA-15, pp. 387-390 (1990).

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