Schottky barrier field effect transistors

Details Schottky barrier field effect transistors Schottky barrier field effect transistors

1984-07-26

1988-11-08

Munson, Gene M.

357 22, 357 89, 357 91, H01L 2964

Patent

active

047836881

ABSTRACT:
A high-grain MESFET (i.e. a Schottky barrier FET) has a gate electrode present directly on a semiconductor body. A highly doped layer, which forms parts of the channel of the transistor, extends below the gate electrode between the source and drain regions respectively. A highly doped surface region of opposite conductivity type to the highly doped layer is present between the gate electrode and the highly doped layer. This surface region, which is so thin that it is fully depleted in the zero gate bias condition, raises the effective height of the Schottky barrier. The highly doped layer is so thin that it can support without breakdown an electric field greater than the critical field for avalanche breakdown of the semiconductor material for this layer. Thus, the doping concentration of the highly doped layer can be increased so that more charge can be depleted from it. The highly doped surface region extends beyond the gate electrode on the drain side of the semiconductor to reduce the surface electric field. Another layer, which is more lightly doped than the highly doped layer of the same conductivity type, increases the mobility of charge carriers in the channel.

REFERENCES:
patent: Re28500 (1975-07-01), Bresee et al.
patent: 3943552 (1976-03-01), Shannon et al.
patent: 3964084 (1976-06-01), Andrews et al.
patent: 4156879 (1979-05-01), Lee
patent: 4193079 (1980-03-01), Yeh
patent: 4292642 (1981-09-01), Appels et al.
patent: 4422089 (1983-12-01), Vaes et al.
patent: 4486766 (1984-12-01), Shannon

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