Light exposure apparatus

Details Light exposure apparatus Light exposure apparatus

1986-07-16

1987-12-29

Hayes, Monroe H.

Photocopying

Projection printing and copying cameras

With temperature or foreign particle control

355 52, 355 53, G03B 2752

Patent

active

047164417

ABSTRACT:
Disclosed is a light exposure apparatus which has a light source, a light exposure optical system, an alignment optical system and a box, the interior of which is at a reduced pressure in which the exposure light path and alignment light path are at least in part disposed. Thereby, higher pattern resolution and more precise alignment can be obtained.

REFERENCES:
patent: 3539256 (1970-11-01), Ables
Popular Science May, 1983, Article entitled "Square Blue Laser".

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