Method of cleaning a substrate in a cleaning tank using plural f

Cleaning and liquid contact with solids – Processes – With treating fluid motion

Patent

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

134 10, 134186, 134199, B08B 302, B08B 304

Patent

active

061325236

ABSTRACT:
A cleaning apparatus and method in accordance with the present invention includes a first inflow section, provided on a first side surface of a cleaning tank having a substantially rectangular parallelopiped shape, having two inflow openings, a second inflow section, provided on a second side surface facing the first side surface, having inflow openings, and outflow openings for releasing a cleaning liquid flown in from the first and second inflow sections. The cleaning liquid flowing in from the inflow openings forms complex and strong flows in the cleaning tank, thus removing contaminants on a cleaning target evenly and efficiently without nonuniformity and preventing stagnation of the cleaning liquid in the cleaning tank. The cleaning liquid released in filtered by a circulatory section and is allowed to flow into the cleaning tank again through a pipe. As a result, it is possible to clean evenly and efficiently a large cleaning target such as a glass substrate used for liquid crystal display devices and other devices.

REFERENCES:
patent: 5860361 (1999-01-01), Nanjyo et al.
patent: 5937878 (1999-08-01), Cheng

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Method of cleaning a substrate in a cleaning tank using plural f does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method of cleaning a substrate in a cleaning tank using plural f, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method of cleaning a substrate in a cleaning tank using plural f will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-464525

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.