Automatic frequency follow-up in particle beam metrology upon em

Details Automatic frequency follow-up in particle beam metrology upon em Automatic frequency follow-up in particle beam metrology upon em

1988-09-30

1990-11-20

Strecker, Gerard R.

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

324158D, 250310, G01R 3126

Patent

active

049721429

ABSTRACT:
A method and apparatus provide compensation of frequency drift phenomenon of a signal to be investigated in an electron beam measuring unit. A regulating signal is acquired from the signal to be investigated and the modulation frequency (f.sub.b) of a beam blanking generator in the electron beam measuring arrangement is modified therewith in accordance with the frequency drift in the investigated signal.

REFERENCES:
patent: 4169229 (1979-09-01), Feuerbaum
patent: 4220853 (1980-09-01), Feuerbaum et al.
patent: 4220854 (1980-09-01), Feuerbaum
patent: 4223220 (1980-09-01), Feuerbaum
patent: 4227679 (1981-07-01), Feuerbaum
patent: 4292519 (1981-09-01), Feuerbaum
patent: 4539477 (1985-09-01), Feuerbaum et al.
patent: 4721855 (1988-01-01), Fazekas
patent: 4745362 (1988-05-01), Brust
patent: 4788495 (1988-11-01), Plies
"Frequency Tracing and Mapping in Theory and Practice" by Brust et al., Apr. 24, 1985, pp. 299-321.
"Electron Beam Testing" by Wolfgang, Microelectronic Engineering 4, 1986, pp. 77-106.
"Voltage Coding: Temporal Versus Spatial Frequencies" by Lukianoff et al., Proceedings of the Eighth Annual Scanning Electron Microscope Symposium, 1975, pp. 465-472.

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