Method for measuring the thickness of a light-reflective layer o

Details Method for measuring the thickness of a light-reflective layer o Method for measuring the thickness of a light-reflective layer o

1990-08-27

1991-12-24

Nelms, David C.

Radiant energy

Photocells; circuits and apparatus

Optical or pre-photocell system

356381, G01V 904

Patent

active

050755595

ABSTRACT:
Measurement of the thickness of a light-reflective layer (20) on a light-translucent substrate (10) is carried out in a non-destructive fashion by placing a light-reflective member of a known height, taller than the layer, adjacent thereto. The height difference between the layer and the member is measured optically, using the triangulation technique. By subtracting the measured height difference from the known height of the member, the height of the light-reflective member is easily obtained.

REFERENCES:
patent: 4461575 (1984-07-01), Miller, Jr. et al.
patent: 4583857 (1986-04-01), Grammerstorff et al.
patent: 4810894 (1989-03-01), Nagao et al.
patent: 4902902 (1990-02-01), Tole

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