Radiant energy – Photocells; circuits and apparatus – Optical or pre-photocell system
Patent
1990-03-14
1991-03-12
Nelms, David C.
Radiant energy
Photocells; circuits and apparatus
Optical or pre-photocell system
356237, G01N 2188, G01N 2189
Patent
active
049995111
ABSTRACT:
A surface state inspecting device, usable with a sample having substantially parallel first and second surfaces coupled by a side wall, for inspecting the state of each of the surfaces, is disclosed. The device includes a light irradiating system for projecting light obliquely to the sample, from the first surface side; an inspecting system for receiving light from the first surface irradiated by the irradiating system and light from the second surface irradiated with the light passed through the first surface, for inspecting the first and second surfaces; and an inspection control system effective to set a time zone for inspection of the first surface so that it does not overlap with the moment at which light impinges on a boundary between the second surface and the side wall.
REFERENCES:
patent: 4431299 (1984-02-01), Matsui et al.
patent: 4460273 (1984-07-01), Koizumi et al.
patent: 4468120 (1984-08-01), Tanimoto et al.
patent: 4669875 (1987-06-01), Shiba et al.
patent: 4779988 (1988-10-01), Horiguchi
patent: 4886975 (1989-12-01), Murakami et al.
Allen Stephone B.
Canon Kabushiki Kaisha
Nelms David C.
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