Piezoelectric transducer and process for its production

Details Piezoelectric transducer and process for its production Piezoelectric transducer and process for its production

1986-01-31

1987-06-30

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310311, 310358, 310365, H01L 4108

Patent

active

046773363

ABSTRACT:
A piezoelectric transducer made from a piezoelectric thin film based on lead titanate (PbTiO.sub.3): comprising a substrate having sawtooth profile gratings formed on the surface by anisotropic etching; a platinum layer formed by graphoepitaxy method on the substance; a piezoelectric thin film formed on the platinum layer; and an upper electrode layer. Although platinum shows (111) orientation, a (100)-oriented platinum film can be obtained by depositing platinum on said substrate having the gratings by graphoepitaxy. A c-axis-oriented piezoelectric film of excellent piezoelectricity can be formed on this platinum film.

REFERENCES:
patent: 3469120 (1969-09-01), Nagao et al.
patent: 3872332 (1975-03-01), Butter
patent: 3891869 (1975-06-01), Scarpa
patent: 3942139 (1976-03-01), Cooper et al.
patent: 4357553 (1982-11-01), Minagawa et al.
patent: 4480209 (1984-10-01), Okamoto et al.

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