Method and apparatus for measuring film thickness utilizing the

Details Method and apparatus for measuring film thickness utilizing the Method and apparatus for measuring film thickness utilizing the

1995-08-28

1997-03-11

Gonzalez, Frank

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356345, G01B 902

Patent

active

056107161

ABSTRACT:
An apparatus and method for measuring the thickness of a film. The film is illuminated with a low coherence light signal that is preferably generated from a source including two or more LEDs. The light reflected from the surfaces of the film is collected and coupled to an interferometer. The slope of the Fourier transform of the output of the signal from the interferometer is measured to provide a determination of the thickness of the film. In the preferred embodiment of the present invention, the interferometer output is sampled at fewer than two points per cycle of the low coherence light signal.

REFERENCES:
patent: 5341205 (1994-08-01), McLandrich et al.
patent: 5459570 (1995-10-01), Swanson et al.

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