Displacement detecting system, an expose apparatus, and a device

Details Displacement detecting system, an expose apparatus, and a device Displacement detecting system, an expose apparatus, and a device

1995-03-29

1997-03-11

Turner, Samuel A.

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

G01B 902

Patent

active

056107153

ABSTRACT:
A displacement detecting system includes a scale provided on a surface of a movable object and having a diffraction grating formed along a predetermined direction, a head unit disposed above the surface of the movable object and having a plurality of detection heads, for detecting displacement of the scale in the predetermined direction, the detection heads being disposed along a direction different from the predetermined direction, and a selecting device for selecting at least one detection head out of the detection heads, for detection of a displacement of the scale in the predetermined direction.

REFERENCES:
patent: 5182610 (1993-01-01), Shibata
patent: 5200800 (1993-04-01), Suda et al.
patent: 5291023 (1994-03-01), Hasegawa et al.
patent: 5333050 (1994-07-01), Nose et al.
patent: 5369486 (1994-11-01), Matsumoto et al.

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