Schottky diode with titanium or like layer contacting the dielec

Details Schottky diode with titanium or like layer contacting the dielec Schottky diode with titanium or like layer contacting the dielec

1983-09-30

1990-02-06

Mintel, William

Textiles: ironing or smoothing

357 71, 357 55, 357 53, H01L 2948

Patent

active

048991996

ABSTRACT:
A schottky diode with a molybdenum schottky barrier layer has its perimeter encircled by a guard ring. The outer periphery of the guard ring is covered by a passivating oxide layer. The periphery of the molybdenum electrode in one embodiment of the invention has a peripheral edge which extends to but is spaced from the facing periphery of the oxide passivating coating. A layer of titanium metal which adheres to oxide better than does molybdenum, overlies the molybdenum layer and contacts the surface exposed by the gap between the molybdenum and the oxide and overlies and adheres to the oxide layer. Nickel and silver layers are then formed atop the titanium metal layer. Alternatively, the underlying molybdenum layer can extend to and over a portion of the oxide layer. The titanium layer extends over the molybdenum layer and contacts the outer periphery of the oxide to encapsulate the molybdenum and hold it atop the oxide. In both embodiments, a process step is employed in which molybdenum is deposited over the entire surface of the device and the outer periphery of the molybdenum layer is etched back from the outer periphery of the oxide to clear a surface area of the oxide to which an overlying titanium layer can adhere.

REFERENCES:
patent: 3512051 (1970-05-01), Noll
patent: 3519900 (1970-07-01), Lawrence
patent: 3567508 (1971-03-01), Cox et al.
patent: 3663184 (1972-05-01), Wood et al.
patent: 3761309 (1973-09-01), Schmihfer et al.
patent: 3878554 (1975-04-01), Mikome et al.
patent: 4065781 (1977-12-01), Gutknecht
patent: 4201999 (1980-05-01), Howard et al.
patent: 4206540 (1980-06-01), Gould
patent: 4408216 (1983-10-01), Gould

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