Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1988-09-02
1990-02-06
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
324 713, 324158R, 324158D, G01R 3126
Patent
active
048991058
ABSTRACT:
A method of testing electrical characteristics with a probe device, wherein an object to be tested is placed on a table of the probe device, and the electrical characteristics of the object are measured while light is supplied from a light source unit outside the test unit to the test unit for the object through a light supplying means unit. A light source need not be arranged inside the test unit, thereby preventing the temperature atmosphere inside the test unit from being disturbed, and the electrical characteristics of the object can be tested under severe conditions with radiation of external light.
REFERENCES:
patent: 4309657 (1982-01-01), Lockhart, Jr. et al.
patent: 4393348 (1983-07-01), Goldstein et al.
patent: 4656419 (1987-04-01), Garlick
patent: 4712063 (1987-12-01), Osterwald et al.
patent: 4715687 (1987-12-01), Glass et al.
patent: 4728174 (1988-03-01), Grinberg et al.
Eisenzopf Reinhard J.
Nguyen Vinh P.
Tokyo Electron Limited
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