Graded oxide/nitride via structure and method of fabrication the

Details Graded oxide/nitride via structure and method of fabrication the Graded oxide/nitride via structure and method of fabrication the

1986-04-30

1988-03-22

Robinson, Ellis P.

Stock material or miscellaneous articles

Structurally defined web or sheet

Discontinuous or differential coating, impregnation or bond

427123, 4272551, 4274197, 428209, 428210, 428428, 428446, 428450, 428469, 428627, 428628, 428629, 428665, 428698, 428901, 437241, 437243, B32B 2714, B32B 900, C25D 1102, B05D 136

Patent

active

047328010

ABSTRACT:
A structure and method for fabricating the structure, which includes a layer containing a refractory metal and a substrate to which the refractory metal-containing layer does not strongly adhere, there being a thin bonding layer between the substrate and the refractory metal-containing layer for providing good adherence between the refractory metal-containing layer and the substrate. The bonding layer is an oxide, nitride or mixed oxy-nitride layer initially prepared to be Si-rich in a surface region thereof. Inclusions of the refractory metal are produced in the bonding layer by substituting the refractory metal for excess free silicon therein. These inclusions become nucleation and bonding sites for refractory metal deposition, ensuring good adhesion.

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