Method for making vertically layered MOMOM tunnel device

Details Method for making vertically layered MOMOM tunnel device Method for making vertically layered MOMOM tunnel device

1986-05-15

1987-06-30

Chaudhuri, Olik

Metal working

Method of mechanical manufacture

Assembling or joining

29579, 29590, H01L 21467, H01L 21475, H01L 2714, H01L 4902

Patent

active

046759808

ABSTRACT:
MOMOM structural geometry and fabrication techniques are is disclosed. First and second metal layer strips (6 and 10) are supported on an insulating substrate (4) and have vertically overlapped portions sandwiched between insulating layers (8, 12). A generally vertical side (18) is defined through the layers to the substrate to expose vertical edges (20, 24) of the metal layers which are oxidized (32, 34) and covered by a third metal layer (44) extending therebetween. In the preferred embodiment, the middle insulating layer (8) is undercut (28), oxidized (36, 40), and filled with metallization (50), to provide a vertical rectilinear conduction path.

REFERENCES:
patent: 3500142 (1970-03-01), Kahng
patent: 4543320 (1985-09-01), Vijan
patent: 4549194 (1985-10-01), Calviello
Farber et al., IBM Tech. Disc. Bull., V. 9, No. 11, (Apr. 1967), pp. 1669-1671.

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