Electricity: measuring and testing – Measuring – testing – or sensing electricity – per se – With rotor
Patent
1986-11-18
1988-11-22
Eisenzopf, Reinhard J.
Electricity: measuring and testing
Measuring, testing, or sensing electricity, per se
With rotor
G01R 3102
Patent
active
047868643
ABSTRACT:
Covering metal test pads of a passivated integrated circuit process intermediate wafer or completed integrated circuit chip-to-test, with a thin conductive overlayer, and then accessing the test pads through the passivation layer and conductive overlayer, by a pulsed laser to provide voltage-modulated photon-assisted tunneling through the insulation layer, to the conductive overlayer as an electron current, and detecting the resulting electron current, provides a nondestructive test of integrated circuits. The passivation, normally present to protect the integrated circuit, also lowers the threshold for photoelectron emission. The conductive overlayer acts as a photoelectron collector for the detector. A chip-to-test which is properly designed for photon assisted tunneling testing has test sites accessible to laser photons even though passivated. Such a chip-to-test may be nondestructively tested in air at one or several stages of its processing, without the sacrifices of mechanical probing or of bringing test sites out to output pads. The conductive overlayer may be removed after tests have been completed. Integrated circuit process intermediate chips may be specially designed for testability, with test sites grouped for easy access through windows left uncovered by subsequent layers.
REFERENCES:
patent: 4051437 (1977-09-01), Lile et al.
patent: 4231811 (1980-11-01), Somekh et al.
patent: 4266138 (1981-05-01), Nelson, Jr. et al.
patent: 4296372 (1981-10-01), Feuerbaum
patent: 4301409 (1981-11-01), Miller et al.
patent: 4332833 (1982-06-01), Aspnes et al.
patent: 4333051 (1982-06-01), Goodman
patent: 4380864 (1983-04-01), Das
patent: 4408883 (1983-10-01), Iwamoto et al.
patent: 4415851 (1983-11-01), Langner et al.
patent: 4417203 (1983-11-01), Pfeiffer et al.
patent: 4417948 (1983-11-01), Mayne-Banton et al.
patent: 4419530 (1983-12-01), Nath
patent: 4435610 (1984-03-01), Perlman et al.
patent: 4588950 (1986-05-01), Henley
patent: 4609867 (1986-09-01), Schink
patent: 4618541 (1986-10-01), Forouhi et al.
patent: 4644264 (1987-02-01), Beha et al.
Z. A. Weinberg and A. Hartstein, "Photon Assisted Tunneling from Aluminum into Silicon Dioxide", Solid State Communications, vol. 20, pp. 179-182 (1976).
Rubloff, "Contactless Measurement of Voltage Levels Using Photoemission", IBM Technical Disclosure Bulletin, vol. 25, No. 3A, Aug. 1982, pp. 1171-1172.
Henley, "Logic Failure Analysis of CMOS Using a Laser Probe", Spectrum Sciences, 3050 Oakmead Village Drive, Santa Clara, California 95051.
Rev. Scientific Instruments, vol. 49, No. 6, Jun. 1978, pp. 756-759, American Institute of Physics, New York, M. Kudo et al. "Computer Controlled ESCA for Nondestructive Surface Characterization Utilizing a TV-Type Position Sensitive Detector".
Fujitsu-Scientific & Technical Journal, vol. 19, No. 4, 1983, pp. 431-441, Kawasaki, Japan, A. Ito et al., "Hemispherical Retarding Type Energy Analyzer for LSI Testing by an Electron Beam".
Microelectronics Journal, vol. 11, No. 2, Mar./Apr. 1980, pp. 35-40, Mackintosh Publications Ltd., Luton, GB; C. E. Jowett, "Surface Analytical Techniques Applied to Electronic Components".
"Data Probe Model 2010 IC Logic Laser Analyzer", Mitsui & Co., 1984.
Menzel and Kubalek, "Secondary Electron Detection Systems for Quantitative Voltage Measurements", Scanning, vol. 5, 151-171 (1983).
Bush et al., "Photoconductor Contacting for Module Testing", IBM Technical Disclosure Bulletin, vol. 15, No. 6, Nov. 1972, pp. 2032-2033.
Beha Johannes G.
Dreyfus Russell W.
Hartstein Allan M.
Rubloff Gary W.
Burns W.
Eisenzopf Reinhard J.
Feig Philip J.
International Business Machines - Corporation
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