Radiant energy – Electron energy analysis
Patent
1987-06-22
1988-11-22
Anderson, Bruce C.
Radiant energy
Electron energy analysis
250347, 250310, H01J 4944, H01J 3900
Patent
active
047868066
ABSTRACT:
A retarding field spectrometer has a mounting ring for attachment to the pole piece of a scanning electron microscope or similar beam generator. Supported by the mounting ring are three screen electrodes with their planes positioned normal to the beam axis and adjustable as a unit in a pseudo-orthogonal manner through two worm and gear drives of eccentrics cooperating with an aperture and a slot, respectively, in a plate carrying the electrode closest to the pole piece. Three continuous dynode electron multipliers are arrayed symmetrically about the beam at-rest axis between the last mentioned electrode and the intermediate electrode. The multipliers have cathodes maintained at substantially the same potential as the intermediate electrode. The electrode furthest from the pole piece is suspended from a mounting ring for the intermediate electrode by means of criss-crossing strands of a continuous plastic monofilament permitting orthogonal adjustment of the furthest electrode relative to the intermediate electrode while insulating electrically one from the other.
REFERENCES:
patent: 3681600 (1972-08-01), Rigden et al.
patent: 4227087 (1980-10-01), Kruz
patent: 4540885 (1985-09-01), Plies et al.
patent: 4658137 (1987-04-01), Garth et al.
patent: 4721910 (1988-01-01), Bokor et al.
Listl Carl A.
Seiwatz Henry
Anderson Bruce C.
GAF Corporation
Guss Paul A.
Maue Marilyn J.
Ward Joshua J.
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