Intergrated circuit element having a planar, solvent-free dielec

Details Intergrated circuit element having a planar, solvent-free dielec Intergrated circuit element having a planar, solvent-free dielec

1989-07-31

1991-07-23

James, Andrew J.

Stock material or miscellaneous articles

Composite

Of bituminous or tarry residue

357 52, 428422, H01L 2328

Patent

active

050348019

ABSTRACT:
An integrated circuit element is provided, which may be an active or passive element, comprising a planar dielectric layer having a thickness 25 micrometers or less and a dielectric constant less than 3.4. The dielectric layer is preferably a fluoropolymer film coated or impregnated with a low ionic content resin. The preferred fluoropolymer is expanded polytetrafluoroethylene and the preferred resin component is a low ionic content polymer having a low dielectric constant, high thermal stability, and low thermal expansion, formed by addition polymerization. "Planarity" is defined as the ratio of the height of the dielectric at a point where there is no feature beneath the layer divided by the height of the dielectric over a feature, including the thickness of the feature. All products according to the invention have planarity exceeding 0.8.

REFERENCES:
patent: 4613888 (1986-09-01), Mase et al.
patent: 4680220 (1987-07-01), Johnson
patent: 4720405 (1988-01-01), Carson et al.
patent: 4731346 (1988-03-01), Ashwell
patent: 4755911 (1988-07-01), Suzuki
patent: 4772509 (1988-09-01), Komada et al.
patent: 4784901 (1988-11-01), Hatakeyama et al.
patent: 4824511 (1989-04-01), Hartman et al.

Affiliated with

Also associated with

Rating

Intergrated circuit element having a planar, solvent-free dielec does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Intergrated circuit element having a planar, solvent-free dielec, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Intergrated circuit element having a planar, solvent-free dielec will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-436537