Method of fabricating high efficiency binary planar optical elem

Radiant energy – Ionic separation or analysis – Static field-type ion path-bending selecting means

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2504921, 350 361, 35016217, 350320, G02B 518

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048465526

ABSTRACT:
The high diffraction efficiency regime of binary gratings occurs at periodicities on the order of a wavelength in order to produce grating which diffract radiation with efficiencies of greater than 90%, a fabrication procedure is disclosed which uses halographic and very large scale integration techniques which allow fine control over the periodicity and depth parameters to produce binary planar optical elements having a ratio of .lambda./T greater than one (where .lambda. equals the wavelength of an illuminating wavefront, and T equals the grating periodicity). Additionally, the disclosed process produces high optical quality diffractive elements with phase precision of as high as .lambda./100. These diffractive elements include laser beam multiplexers, beam profile shapers, and binary lenses which are lossless optical transfer functions.

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Wilson et al., "Automatic Electron Beam Fabrication of Micron-Size Devices," Conference on Scanning Electron Microscopy, Part IV, pp. 659-668 (Apr., 1976).
Veldkamp et al., "Developments in Fabrication of Binary Optical Elements," SPIE, vol. 437, International Conference on Computer-Generated Holography, 1983, pp. 54-59.

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