Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2007-09-04
2011-12-13
Phan, Thiem (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S592100, C029S825000, C029S831000, C029S846000
Reexamination Certificate
active
08074346
ABSTRACT:
The methods described herein provide for a radio frequency micro-electromechanical systems switch having two or more resonant frequencies. The switch can be configured as a capacitive shunt switch having a deflectable member coupled between two electrodes over a transmission line. A first insulator can be located between one of the electrodes and the deflectable member to form a capacitive element. The deflectable member can be deflectable between an up-state and a down-state, the down-state capacitively coupling the deflectable member with the transmission line. The degree by which the deflectable member overlaps the first insulator can be adjusted to adjust the capacitance of the capacitive element and the resulting resonant frequency.
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patent: 6529093 (2003-03-01), Ma
patent: 6639488 (2003-10-01), Deligianni et al.
patent: 6880235 (2005-04-01), Ma
patent: 7265647 (2007-09-01), Qian et al.
Muldavin et al., “High Isolation CPW MEMS Shunt Switches—Part 2: Design”, IEEE Transactions on Microwave Theory and Techniques, vol. 48, No. 6, Jun. 2000, pp. 1053-1056.
Qian et al., “RF MEMS Asymmetric Capacitive Switch with High-Isolation at Selected Low-Microwave Frequency”, Microwave and Optical Technology Letters, vol. 49, No. 3, Mar. 2007, pp. 702-706.
Bachman Mark
Cetiner Bedri A.
Chang Hung-Pin
DeFlaviis Franco
Li Guann-Pyng
Orrick Herrington & Sutcliffe LLP
Phan Thiem
The Regents of the University of California
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