Mechanically actuated air tight device for wafer carrier

Details Mechanically actuated air tight device for wafer carrier Mechanically actuated air tight device for wafer carrier

1998-06-29

2011-12-27

Lugo, Carlos (Department: 3674)

Closure fasteners

Bolts

Sliding

C292S159000, C292SDIG011, C292S150000, C292SDIG012, C206S710000

Reexamination Certificate

active

08083272

ABSTRACT:
A mechanically actuated airtight device for wafer carrier comprises a cover, at least one sealing gasket, at least one linked plate, and a driving wheel. The cover has a first face and a second face, and being formed with at least one hole therethrough. The sealing gasket is positioned above the hole of said cover, and has a base in a form of wedged ramp, where the base is further formed with a through opening. The linked plate has a first face and a second face, where the second face is at one side provided with a protuberance, and the first face is provided with at least one wedged ramp, and where the wedged ramp has a slope equal to that of the wedged ramp of the base, such that at least one of the wedged ramp of the first face of the linked plate mates with the wedged ramp of the second face of the linked plate. The driving wheel has a first face and a second face, where the first face is provided with a first guiding groove to allow the protuberance of the linked plate move along the first guiding groove. The invention is used as a chassis for a wafer carrier. Thus, when the wafer carrier is closed, it ensures a better airtight effect, and when the wafer carrier is opened so as to break the airtight, a pressure equalizing effect between the inside and outside of the wafer carrier is achieved enhancing removal of the casing of the wafer carrier quickly. Further, the level of the airtight can be adjusted as required.

REFERENCES:
patent: 1273625 (1918-07-01), Lane
patent: 2473065 (1949-06-01), Miller
patent: 3333878 (1967-08-01), Pelcin
patent: 3614395 (1971-10-01), Harshman
patent: 3630089 (1971-12-01), Bissell
patent: 4995430 (1991-02-01), Bonora et al.
patent: 5482161 (1996-01-01), Williams et al.
patent: 5570987 (1996-11-01), McKenna
patent: 5599028 (1997-02-01), Neumann et al.
patent: 5649639 (1997-07-01), Dolvet et al.
patent: 5711427 (1998-01-01), Nyseth
patent: 5722707 (1998-03-01), Hosoi
patent: 5740845 (1998-04-01), Bonora et al.
patent: 5743424 (1998-04-01), Murata et al.
patent: 5915562 (1999-06-01), Nyseth et al.
patent: 5957292 (1999-09-01), Mikkelsen et al.
patent: 6105782 (2000-08-01), Fujimori et al.
patent: 6398475 (2002-06-01), Ishikawa
patent: 6430877 (2002-08-01), Rosenquist et al.
patent: 6457598 (2002-10-01), Hsieh et al.
patent: 6622883 (2003-09-01), Wu et al.
patent: 6749067 (2004-06-01), Eggum
patent: 6902063 (2005-06-01), Pai et al.
patent: 7048127 (2006-05-01), Hyobu et al.
patent: 7455181 (2008-11-01), Matsutori et al.
patent: 7578407 (2009-08-01), Tieben et al.
patent: 7677393 (2010-03-01), Burns et al.
patent: 7784640 (2010-08-01), Matsutori et al.
patent: 7828341 (2010-11-01), Hasegawa et al.
patent: 7886910 (2011-02-01), Bores et al.

Affiliated with

Also associated with

Rating

Mechanically actuated air tight device for wafer carrier does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Mechanically actuated air tight device for wafer carrier, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Mechanically actuated air tight device for wafer carrier will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4315568