Electrostatic chuck with anti-reflective coating, measuring...

Details Electrostatic chuck with anti-reflective coating, measuring... Electrostatic chuck with anti-reflective coating, measuring...

2009-05-06

2011-12-20

Lyons, Michael A (Department: 2877)

Optics: measuring and testing

By light interference

For dimensional measurement

C361S234000

Reexamination Certificate

active

08081317

ABSTRACT:
The embodiments disclosed herein relate to an electrostatic chuck, or an optically structured element or an optical mask that comprise a metal film as well as a transparent cover applied on a substrate. At least two anti-reflective films are inserted between the metal film and the cover that reduce the reflectance of the metal film, as viewed from the surface, to almost zero. As a result, a direct interferometer measurement of the surface structure of the transparent cover is possible. Methods of measurement and of use are also disclosed.

REFERENCES:
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patent: 5753132 (1998-05-01), Shamouilian et al.
patent: 6284085 (2001-09-01), Gwo
patent: 6908716 (2005-06-01), Chan
patent: 2003/0180634 (2003-09-01), Buxbaum et al.
patent: 2007/0128528 (2007-06-01), Hess et al.
patent: 2008/0151467 (2008-06-01), Simpson
patent: 2008/0185960 (2008-08-01), Koshiyama
patent: 2009/0161285 (2009-06-01), Abouaf et al.

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