Method of fabricating semiconductor device

Details Method of fabricating semiconductor device Method of fabricating semiconductor device

2009-07-13

2011-12-27

Nguyen, Kimberly (Department: 2894)

Semiconductor device manufacturing: process

Chemical etching

Combined with the removal of material by nonchemical means

C257SE21304

Reexamination Certificate

active

08084364

ABSTRACT:
A method of fabricating a semiconductor device, includes forming an amorphous silicon film above a semiconductor substrate, partially removing the amorphous silicon film and partially removing the semiconductor substrate, thereby forming an element isolation trench in a surface of the semiconductor substrate, forming an insulating film above the amorphous silicon film so that the element isolation trench is filled with the insulating film, polishing the insulating film by a chemical-mechanical polishing method with the amorphous silicon film serving as a stopper, thereby planarizing an upper surface of the insulating film, and thermally-treating the amorphous silicon film, thereby converting the amorphous silicon film to a polysilicon film after polishing the insulating film.

REFERENCES:
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patent: 2006/0246723 (2006-11-01), Park et al.
patent: 2007/0284338 (2007-12-01), Matsui et al.
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U.S. Appl. No. 12/956,591, filed Nov. 30, 2010, Fujita, et al.
Office Action issued Jan. 27, 2011, in Korean Patent Application No. 10-2009-63330 (with English-language Translation).

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