Semiconductor wafer holder and electroplating system for...

Details Semiconductor wafer holder and electroplating system for... Semiconductor wafer holder and electroplating system for...

2010-10-13

2011-12-13

Van, Luan (Department: 1724)

Electrolysis: processes, compositions used therein, and methods

Electrolytic coating

Coating predominantly semiconductor substrate

Reexamination Certificate

active

08075756

ABSTRACT:
A semiconductor wafer holder includes first and second holding members between which a semiconductor wafer is held. The second holding member includes a second conductive element placed in contact with a first conductive element of the first holding member and the semiconductor wafer. A ring clamp is used to press the second holding member against the first holding member for holding of the semiconductor wafer.

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