Tray handling apparatus and semiconductor device inspecting...

Conveyors: power-driven – Conveyor for changing attitude of item relative to conveyed... – For inverting successive items

Reexamination Certificate

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Details

C198S375000, C414S758000, C414S773000, C414S783000

Reexamination Certificate

active

08056698

ABSTRACT:
Disclosed is a tray handling apparatus in which the conveyance and inversion of a tray can be performed simultaneously to thereby achieve a rapid inspecting operation and a simplified apparatus configuration, and a semiconductor device inspecting method using the tray handling apparatus. The tray handling apparatus includes an inverting unit to turn the tray, in which objects are received, upside down, and a transfer device to convey the object receiving tray from one conveyor to another conveyor while being reciprocally moved above a body of the apparatus. The inverting unit is integrally provided at a lower end of the transfer device, to allow the conveyance and inversion of the tray to be performed simultaneously.

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