Piezoelectric thin film elemental device, sensor and actuator

Details Piezoelectric thin film elemental device, sensor and actuator Piezoelectric thin film elemental device, sensor and actuator

2009-04-21

2011-12-27

Dougherty, Thomas (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S311000

Reexamination Certificate

active

08084925

ABSTRACT:
A piezoelectric thin film element has a piezoelectric thin film on a substrate, the piezoelectric thin film has a (K1-x,Nax)NbO3thin film expressed by a compositional formula (K1-xNax)NbO3(0 <x <1) with a perovskite structure, and a ratio of an out-of-plane directional lattice constant c to an in-plane directional lattice constant a of the thin film is in a range of 0.98 ≦c/a ≦1.01.

REFERENCES:
patent: 7145285 (2006-12-01), Torii et al.
patent: 7323806 (2008-01-01), Shibata et al.
patent: 7518293 (2009-04-01), Shibata et al.
patent: 7701121 (2010-04-01), Oka et al.
patent: 7732996 (2010-06-01), Shibata et al.
patent: 2005/0127795 (2005-06-01), Torii et al.
patent: 2005-203725 (2005-07-01), None

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