Piezoelectric thin-film resonator, filter using the same,...

Details Piezoelectric thin-film resonator, filter using the same,... Piezoelectric thin-film resonator, filter using the same,...

2009-08-04

2011-12-27

Dougherty, Thomas (Department: 2837)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000

Reexamination Certificate

active

08084919

ABSTRACT:
A piezoelectric thin film resonator includes a substrate, a lower electrode formed on the substrate, a piezoelectric film formed on the lower electrode, and an upper electrode formed on the piezoelectric film, the lower electrode and the upper electrode opposing each other through the piezoelectric film to form an opposing region, the opposing region including a space at a boundary of the opposing region. The space extends from an innerside to an outer side of the opposing region and is formed in or on the piezoelectric film.

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