Semiconductor apparatus

Details Semiconductor apparatus Semiconductor apparatus

2009-04-28

2011-12-06

Hoang, Quoc (Department: 2892)

Active solid-state devices (e.g., transistors, solid-state diode

With shielding

C257SE23114

Reexamination Certificate

active

08072048

ABSTRACT:
Disclosed is a semiconductor apparatus that prevents diffusion of materials of a magnetic film during the process for manufacturing the semiconductor apparatus. The semiconductor apparatus includes: a substrate; a semiconductor device formed on a principal surface of the substrate and including an interconnect layer; a magnetic shielding film of a magnetic material covering the semiconductor device; and a buffer film disposed between the semiconductor device and the magnetic shielding film. The buffer film prevents diffusion of the magnetic material of the magnetic shielding film.

REFERENCES:
patent: 6936763 (2005-08-01), Rizzo et al.
patent: 2010/0276791 (2010-11-01), Kaneko et al.
patent: 6-21060 (1994-01-01), None
patent: 6-120027 (1994-04-01), None
patent: 9-330929 (1997-12-01), None

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