Substrate measuring method, computer-readable recording...

Details Substrate measuring method, computer-readable recording... Substrate measuring method, computer-readable recording...

2007-09-17

2011-10-18

Lau, Tung S (Department: 2857)

Data processing: measuring, calibrating, or testing

Measurement system in a specific environment

Quality evaluation

Reexamination Certificate

active

08041525

ABSTRACT:
In the present invention, for measurement of line widths, for example, at 36 locations within a substrate processed in a coating and developing treatment system, the 36 measurement points are divided and, for example, six substrates are used to measure the line widths at all of measurement points. In this event, the line widths at six measurement points are measured in each of the substrate, which exist in substrate regions different for each substrate. Then, the measurement results of the line widths at the measurement points of the substrates are combined, so that the line widths at 36 measurement points are finally detected. According to the present invention, the measurements of product substrates can be performed without decreasing the throughput of processing of the product substrates.

REFERENCES:
patent: 6392434 (2002-05-01), Chiu
patent: 2004/0097063 (2004-05-01), Sakuma et al.
patent: 2003-209093 (2003-07-01), None
patent: 2006-128572 (2006-05-01), None
patent: WO 2006/085527 (2006-08-01), None
patent: WO 2006/087938 (2006-08-01), None
patent: WO 2006/087955 (2006-08-01), None
Tadao Takeda, Methodology of Process Evaluation with Wafer-mapping Techniques for Statistical Process Control, Proc. IEEE 1994 Int. Conference on Microelectronic Test Structures, vol. 7, Mar. 1994, p. 85-89.

Affiliated with

Also associated with

Rating

Substrate measuring method, computer-readable recording... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Substrate measuring method, computer-readable recording..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Substrate measuring method, computer-readable recording... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4298759