Process for producing polymer for semiconductor lithography

Details Process for producing polymer for semiconductor lithography Process for producing polymer for semiconductor lithography

2007-12-20

2011-10-04

Wu, David W (Department: 1762)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

Effecting a change in a polymerization process in response...

C526S072000

Reexamination Certificate

active

08030419

ABSTRACT:
To provide a method for producing a polymer for semiconductor lithography which can attain high uniformity in the polymer from lot to lot. The method for producing a polymer for semiconductor lithography includes the step (P) of heating a polymerizable monomer and a polymerization initiator in a solvent, to thereby polymerize the monomer, the step (P) having the step of controlling a polymerization pressure by regulating a liquid level in a container (WO) which is disposed between a polymerization tank and the atmospheric air and which provides liquid sealing.

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