Dynamic magnetic information storage or retrieval – Head – Core
Patent
1997-05-05
1999-03-02
Heinz, A. J.
Dynamic magnetic information storage or retrieval
Head
Core
G11B 5147
Patent
active
058779248
ABSTRACT:
A thin film magnetic head is capable of providing sufficient characteristics as an interlayer insulation layer even when a low temperature heat treatment is performed, and improving throughput of a process. The thin film magnetic head is fabricated by forming a protective layer 2 on a substrate 1, forming a lower shield 3 on the protective layer 2, forming a reading MR portion 4 on the lower shield 3, and forming an insulation layer 5 as a gap layer. A soft magnetic material layer of permalloy is formed as a common pole 6. On the common pole 6, a negative type photoresist 7 is applied. A patterning is performed by irradiating a light via an insulation layer pattern mask 9 and performing etching by a developer. Then, heat treatment is performed at a temperature lower than or equal to 200.degree. C. under inert atmosphere to form an interlayer insulation layer. Over this, a coil 8 is formed. In order to solve a step, a negative type photoresist 7 is applied to form an interlayer insulation layer.
REFERENCES:
patent: 5448822 (1995-09-01), Wu
C.A. Cortellino et al., "Photoresist for Use in Silicon Nitride Etching Baths", IBM Technical Disclosure Bulletin, vol. 14, No. 8, Jan. 1972, p. 2309.
Heinz A. J.
NEC Corporation
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