Metal working – Method of mechanical manufacture – Electrical device making
Reexamination Certificate
2008-07-01
2011-10-11
Banks, Derris (Department: 3729)
Metal working
Method of mechanical manufacture
Electrical device making
C029S831000, C029S830000, C029S840000, C029S874000
Reexamination Certificate
active
08033012
ABSTRACT:
A space transformer for a semiconductor test probe card and method of fabrication. The method may include depositing a first metal layer as a ground plane on a space transformer substrate having a plurality of first contact test pads defining a first pitch spacing, depositing a first dielectric layer on the ground plane, forming a plurality of second test contacts defining a second pitch spacing different than the first pitch spacing, and forming a plurality of redistribution leads on the first dielectric layer to electrically couple the first contact test pads to the second contact test pads. In some embodiments, the redistribution leads may be built directly on the space transformer substrate. The method may be used in one embodiment to remanufacture an existing space transformer to produce fine pitch test pads having a pitch spacing smaller than the original test pads. In some embodiments, the test pads may be C4 test pads.
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Chao Clinton Chih-Chieh
Hsu Ming Cheng
Banks Derris
Duane Morris LLP
Nguyen Tai
Spanitz Frank J.
Taiwan Semiconductor Manufacturing Co. Ltd.
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