Procedure for obtaining nanotube layers of carbon with...

Details Procedure for obtaining nanotube layers of carbon with... Procedure for obtaining nanotube layers of carbon with...

2008-06-27

2011-10-18

Nguyen, Khiem D (Department: 2823)

Semiconductor device manufacturing: process

Coating with electrically or thermally conductive material

C438S618000, C438S642000, C438S643000, C257SE51038, C257SE51040, C977S700000, C977S742000, C977S855000

Reexamination Certificate

active

08039380

ABSTRACT:
The present invention relates to a process for producing a carbon nanotube (CNT) mat on a conductive or semiconductor substrate. According to this process, a catalytic complex comprising at least one metal layer is firstly deposited on said substrate. Said metal layer then undergoes an oxidizing treatment. Finally, carbon nanotubes are grown from the metal layer thus oxidized. The present invention also relates to a process for producing a via using said CNT mat production process.

REFERENCES:
patent: 6699642 (2004-03-01), Chung et al.
patent: 7201627 (2007-04-01), Ohnuma
patent: 2003/0021966 (2003-01-01), Segal et al.
patent: 2003/0179559 (2003-09-01), Engelhardt et al.
patent: 2005/0215049 (2005-09-01), Horibe et al.
patent: 2005/0230270 (2005-10-01), Ren et al.
patent: 2007/0248758 (2007-10-01), Ward et al.
patent: 0030141 (2000-05-01), None
patent: 0161753 (2001-08-01), None
patent: 2005025734 (2005-03-01), None
European Search Report, EP 09163710, dated Jul. 28, 2009.
Qian Wen et al., “Oxygen-assisted Synthesis of SWNTs from Methane Decomposition”, Nanotechnology, IOP, Bristol, GB, vol. 18, No. 21, pp. 1-6 (May 30, 2007).
Guofang Zhong et al., “Growth Kinetics of 0.5cm Vertically Aligned Single-Walled Carbon Nanotubes”, Chem. B. (Letters), 111(8), pp. 1907-1910 (Feb. 6, 2007).

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