Plasma treatment apparatus and plasma treatment method

Details Plasma treatment apparatus and plasma treatment method Plasma treatment apparatus and plasma treatment method

2007-09-11

2011-11-15

Paschall, Mark (Department: 3742)

Electric heating

Metal heating

By arc

C219S121580, C219S121520, C118S7230IR, C156S345340, C156S345510

Reexamination Certificate

active

08058586

ABSTRACT:
A plasma treatment apparatus that can perform an excellent plasma treatment on a portion of a work which is to be used for producing products or parts, while preventing undesirable occurrence of discharge at that portion reliably is provided. The plasma treatment apparatus performs a plasma treatment on a plate-shaped work having an usable region to be used for producing products or parts and an unusable region other than the usable region. The plasma treatment apparatus includes a first electrode, a second electrode provided so as to face the first electrode via the work so that a space is formed between the second electrode and the work, a gas supply unit which supplies a gas into the space, a power circuit having a power source which applies a high frequency voltage across the first and second electrodes so that the gas supplied into the space is converted into a plasma, and a support unit which supports at least a part of the second region of the work so that the work is spaced apart from the first electrode in a distance at which discharge does not occur between the first region and the first electrode when the high frequency voltage is applied across the first and second electrodes. A plasma treatment method performed using such a plasma treatment apparatus is also provided.

REFERENCES:
patent: 06-244175 (1994-09-01), None
patent: 07-211769 (1995-08-01), None
patent: 2004-158563 (2004-06-01), None
patent: 2002-0033441 (2002-05-01), None
Taiwanese IPO; Office Action in foreign application (TW 094124985) to which priority is claimed by the present application; Aug. 8, 2008.

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