Textured surface monitoring and control apparatus

Details Textured surface monitoring and control apparatus Textured surface monitoring and control apparatus

1997-09-19

1999-03-02

Kim, Robert

Optics: measuring and testing

By dispersed light spectroscopy

Utilizing a spectrometer

356359, 356371, G01B 902

Patent

active

058778586

ABSTRACT:
Optical apparatus is provided for inspecting a textured surface measures a level of scattered reflections from the surface, occurring when an inspection laser beam is directed at the surface. In a first version of the apparatus, the intensity of scattered reflections directed at a single light-sensitive element are compared with the intensity of specular reflections directed at another light-sensitive element. In a second version, diffraction rings formed by the scattered reflections are passed through a mask which attenuates their intensity according to differences between the actual diffraction rings and a predetermined diffraction pattern. In a third version, the scattered light is divided by a beamsplitter to pass through one mask which increases attenuation as the diffraction rings are increased in size compared to a predetermined diffraction pattern or through another mask which decreases attenuation as the diffraction rings are decreased in size compared to the predetermined diffraction pattern.

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