Method of detecting MEM device faults with single current pulse

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Reexamination Certificate

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C347S055000, C347S065000

Reexamination Certificate

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08038252

ABSTRACT:
A method of detecting a fault within a micro electro-mechanical device is provided. The micro electro-mechanical device has a support structure and an actuating arm that is movable relative to the support structure because of thermal expansion of at least part of the actuating arm caused by heat inducing current flow through at least that part. The method comprises the steps of passing a first current pulse having a predetermined duration tpthrough at least the part of the actuating arm and determining movement of the actuating arm in response thereto.

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