System for suppressing undesirable oscillations in a MEMS...

Optical: systems and elements – Deflection using a moving element – Using a periodically moving element

Reexamination Certificate

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C359S199400, C331S154000, C331S155000

Reexamination Certificate

active

08059322

ABSTRACT:
A system for suppressing undesirable oscillations in a micro-electro-mechanical system (MEMS) scanner is provided. The system includes a tunable notch filter and a MEMS scanner. The tunable notch filter is operable to receive an original drive signal and to generate a compensated drive signal based on the original drive signal. The MEMS scanner, which is coupled to the tunable notch filter, is operable to receive the compensated drive signal and to be driven by the compensated drive signal without oscillating at a first mode resonance frequency.

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