Supporting device, optical apparatus, exposure apparatus,...

Details Supporting device, optical apparatus, exposure apparatus,... Supporting device, optical apparatus, exposure apparatus,...

2010-09-07

2011-11-22

Hasan, Mohammed (Department: 2873)

Optical: systems and elements

Lens

With support

C359S822000

Reexamination Certificate

active

08064152

ABSTRACT:
The present invention provides a supporting device that supports an optical element, comprising: a first supporting member that is fixed to an outer circumference of the optical element; a plurality of members that is connected to an outer circumference of the first supporting member; and a second supporting member that supports the first supporting member via the plurality of members, wherein each of the plurality of members is configured such that the a rigidity thereof in a first direction inclined relative to a direction orthogonal to an optical axis of the optical element in a plane including the optical axis is lower than a rigidity thereof in each of two directions that are orthogonal to the first direction and that are orthogonal to each other.

REFERENCES:
patent: 5117311 (1992-05-01), Nomura
patent: 6122114 (2000-09-01), Sudo et al.
patent: 08-68899 (1996-03-01), None
patent: 10-96843 (1998-04-01), None
patent: 2001-343576 (2001-12-01), None
U.S. Appl. No. 12/876,940, filed Sep. 7, 2010, Yuji Sudoh.

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