Photocopying – Projection printing and copying cameras – Step and repeat
Reexamination Certificate
2007-04-20
2011-10-25
Nguyen, Hung Henry (Department: 2882)
Photocopying
Projection printing and copying cameras
Step and repeat
C355S030000, C355S072000
Reexamination Certificate
active
08045136
ABSTRACT:
A lithographic projection apparatus includes a substrate table to hold a substrate, a projection system to project a patterned beam of radiation onto the substrate and a liquid confinement structure to confine a liquid in a space between the projection system and the substrate, the substrate, the substrate table, or both, to form a part of a boundary of the space. In addition, a closing plate forms a part of a boundary of the space in place of the substrate, the substrate table, or both, when moved without substantially disturbing the liquid, the liquid confinement structure, or both.
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Nguyen Hung Henry
Nikon Corporation
Oliff & Berridg,e PLC
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