Integrated silicon micro-actuator slider

Dynamic magnetic information storage or retrieval – Head mounting – For adjusting head position

Reexamination Certificate

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Reexamination Certificate

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08040639

ABSTRACT:
An integrated microactuator slider. The microactuator includes a substrate having a fixed portion and a moveable portion. The microactuator also includes a slider communicatively integrated within the moveable portion of the substrate. The slider includes a read/write head for reading data from or writing data to a data storage device. The microactuator further includes a force generator communicatively integrated within the substrate. The force generator is for causing movement of the moveable portion of the substrate.

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Lu, et al., “A Silicon Microactuator Using Integrated Microfabrication Technology”,IEEE Transactions on Magnetics, vol. 39, No. 5, (Sep. 2003),2240-2242.

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