Pulse modifier, lithographic apparatus and device...

Details Pulse modifier, lithographic apparatus and device... Pulse modifier, lithographic apparatus and device...

2008-11-26

2011-10-04

Wells, Nikita (Department: 2881)

Radiant energy

Radiant energy generation and sources

With radiation modifying member

C250S503100, C250S227120, C250S493100, C372S030000, C372S025000, C372S700000, C398S161000

Reexamination Certificate

active

08030628

ABSTRACT:
A pulse modifier, and associated lithographic apparatus and a method for manufacturing a device, is disclosed. The pulse modifier is configured to receive an input pulse of radiation and further configured to emit a plurality of corresponding output pulse portions of radiation, wherein the respective pulse portions are respectively mirrored about an axis transverse to the optical axis and mirrored about a point of the optical axis of the pulse portions.

REFERENCES:
patent: 5656882 (1997-08-01), Lazarus et al.
patent: 7326948 (2008-02-01), Botma
patent: 7432517 (2008-10-01), Botma et al.
patent: 7714986 (2010-05-01), Visser et al.
patent: 2007/0090278 (2007-04-01), Botma
patent: 2010/0163757 (2010-07-01), Joobeur et al.
patent: 2000-244036 (2000-09-01), None
patent: 2005-502208 (2005-01-01), None
patent: 2006-148115 (2006-06-01), None
patent: 2007-052428 (2007-03-01), None
English language Abstract of Japanese Patent Publication No. 2000-24436 A, Japanese Patent Office, published Sep. 8, 2000; 1 page.
English language Abstract of Japanese Patent Publication No. 2006-148115 A, Japanese Patent Office, published Jun. 8, 2006; 1 page.
English language Abstract of Japanese Patent Publication No. 2007-052428 A, Japanese Patent Office, published Mar. 1, 2007; 1 page.
English translation of Japanese Notice of Reasons for Rejection directed to related Japanese Patent Application No. 2008-312093, Japanese Patent Office, mailed May 6, 2011; 2 pages.

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