Method and system for obtaining bounds on process parameters...

Details Method and system for obtaining bounds on process parameters... Method and system for obtaining bounds on process parameters...

2007-11-08

2011-11-15

Geisel, Kara E (Department: 2877)

Image analysis

Applications

Manufacturing or product inspection

Reexamination Certificate

active

08059884

ABSTRACT:
Embodiments of the present invention provide a method of performing printability verification of a mask layout. The method includes creating one or more tight clusters; computing a set of process parameters associated with a point on said mask; comparing said set of process parameters to said one or more tight clusters; and reporting an error when at least one of said process parameters is away from said one or more tight clusters.

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International Search Report and Written Opinion—Intern'l filing date—April 23, 2008 PCT/US2008/061196.

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