Silicon nitride-melilite composite sintered body and device...

Details Silicon nitride-melilite composite sintered body and device... Silicon nitride-melilite composite sintered body and device...

2009-11-11

2011-12-06

Group, Karl (Department: 1731)

Compositions: ceramic

Ceramic compositions

Refractory

C324S762010, C324S754100

Reexamination Certificate

active

08071496

ABSTRACT:
A silicon nitride-melilite composite sintered body in accordance with the invention includes silicon nitride and a melilite Me2Si3O3N4, where Me denotes a metal element combining with silicon nitride to generate the melilite. The silicon nitride-melilite composite sintered body contains Si in a range of 41 to 83 mole percent in Si3N4equivalent and Me in a range of 13 to 50 mole percent in oxide equivalent. The silicon nitride-melilite composite sintered body has an average thermal expansion coefficient that is arbitrarily adjustable in a range of 2 to 6 ppm/K at temperatures of 23 to 150° C. The silicon nitride-melilite composite sintered body has a high Young's modulus, a high mechanical strength, and excellent sintering performance. A device used for inspection of semiconductor in accordance with the invention utilizes such a silicon nitride-melilite composite sintered body.

REFERENCES:
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patent: 2002128567 (2002-05-01), None
patent: 2002-257853 (2002-09-01), None

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