Non-volatile resistive oxide memory cells, non-volatile...

Semiconductor device manufacturing: process – Having metal oxide or copper sulfide compound semiconductor...

Reexamination Certificate

Rate now

  [ 0.00 ] – not rated yet Voters 0   Comments 0

Details

C438S478000, C438S479000, C438S466000, C257S004000, C257S489000, C257SE21495

Reexamination Certificate

active

08034655

ABSTRACT:
A method of forming a non-volatile resistive oxide memory cell includes forming a first conductive electrode of the memory cell as part of a substrate. Insulative material is deposited over the first electrode. An opening is formed into the insulative material over the first electrode. The opening includes sidewalls and a base. The opening sidewalls and base are lined with a multi-resistive state layer comprising multi-resistive state metal oxide-comprising material which less than fills the opening. A second conductive electrode of the memory cell is formed within the opening laterally inward of the multi-resistive state layer lining the sidewalls and elevationally over the multi-resistive state layer lining the base. Other aspects and implementations are contemplated.

REFERENCES:
patent: 4964080 (1990-10-01), Tzeng
patent: 5049970 (1991-09-01), Tanaka et al.
patent: 5122476 (1992-06-01), Fazan et al.
patent: 6552952 (2003-04-01), Pascucci
patent: 6693821 (2004-02-01), Hsu et al.
patent: 6693846 (2004-02-01), Fibranz
patent: 6753561 (2004-06-01), Rinerson et al.
patent: 6753562 (2004-06-01), Hsu et al.
patent: 6778421 (2004-08-01), Tran
patent: 6785159 (2004-08-01), Tuttle
patent: 6806531 (2004-10-01), Chen et al.
patent: 6834008 (2004-12-01), Rinerson et al.
patent: 6905937 (2005-06-01), Hsu et al.
patent: 6930324 (2005-08-01), Kowalski et al.
patent: 6940113 (2005-09-01), Hsu et al.
patent: 6946702 (2005-09-01), Jang
patent: 6955992 (2005-10-01), Zhang et al.
patent: 6958273 (2005-10-01), Chen et al.
patent: 6961258 (2005-11-01), Lowrey
patent: 6970375 (2005-11-01), Rinerson et al.
patent: 6972211 (2005-12-01), Hsu et al.
patent: 7002197 (2006-02-01), Perner et al.
patent: 7005350 (2006-02-01), Walker et al.
patent: 7009278 (2006-03-01), Hsu
patent: 7050316 (2006-05-01), Lin et al.
patent: 7067862 (2006-06-01), Rinerson et al.
patent: 7085167 (2006-08-01), Lee et al.
patent: 7149108 (2006-12-01), Rinerson et al.
patent: 7167387 (2007-01-01), Sugita et al.
patent: 7180160 (2007-02-01), Ferrant et al.
patent: 7187201 (2007-03-01), Trimberger
patent: 7193267 (2007-03-01), Hsu et al.
patent: 7205238 (2007-04-01), Pan et al.
patent: 7233024 (2007-06-01), Scheuerlein et al.
patent: 7236389 (2007-06-01), Hsu
patent: 7247876 (2007-07-01), Lowrey
patent: 7323349 (2008-01-01), Hsu et al.
patent: 7388775 (2008-06-01), Bedeschi et al.
patent: 7405967 (2008-07-01), Kozicki et al.
patent: 7557424 (2009-07-01), Wong et al.
patent: 7570511 (2009-08-01), Cho et al.
patent: 7639523 (2009-12-01), Celinska et al.
patent: 7687793 (2010-03-01), Harshfield et al.
patent: 7696077 (2010-04-01), Liu
patent: 7751163 (2010-07-01), Duch et al.
patent: 7755076 (2010-07-01), Lung
patent: 7768812 (2010-08-01), Liu
patent: 7772580 (2010-08-01), Hofmann et al.
patent: 7777215 (2010-08-01), Chien et al.
patent: 2002/0018355 (2002-02-01), Johnson et al.
patent: 2002/0196695 (2002-12-01), Pascucci
patent: 2003/0218929 (2003-11-01), Fibranz
patent: 2004/0002186 (2004-01-01), Vyvoda et al.
patent: 2004/0108528 (2004-06-01), Hsu et al.
patent: 2004/0124407 (2004-07-01), Kozicki et al.
patent: 2004/0245547 (2004-12-01), Stipe
patent: 2005/0032100 (2005-02-01), Heath et al.
patent: 2005/0205943 (2005-09-01), Yamada
patent: 2005/0250281 (2005-11-01), Ufert et al.
patent: 2005/0269646 (2005-12-01), Yamada
patent: 2005/0287741 (2005-12-01), Ding
patent: 2006/0035451 (2006-02-01), Hsu
patent: 2006/0062049 (2006-03-01), Lee et al.
patent: 2006/0099813 (2006-05-01), Pan et al.
patent: 2006/0160304 (2006-07-01), Hsu et al.
patent: 2006/0170027 (2006-08-01), Lee et al.
patent: 2006/0171200 (2006-08-01), Rinerson et al.
patent: 2006/0284242 (2006-12-01), Jo
patent: 2007/0010082 (2007-01-01), Pinnow et al.
patent: 2007/0015330 (2007-01-01), Li et al.
patent: 2007/0045615 (2007-03-01), Cho et al.
patent: 2007/0048990 (2007-03-01), Zhuang et al.
patent: 2007/0109835 (2007-05-01), Hsu
patent: 2007/0121369 (2007-05-01), Happ
patent: 2007/0132049 (2007-06-01), Stipe
patent: 2007/0165434 (2007-07-01), Lee et al.
patent: 2007/0167008 (2007-07-01), Hsu et al.
patent: 2007/0173019 (2007-07-01), Ho et al.
patent: 2007/0224770 (2007-09-01), Nagashima
patent: 2007/0231988 (2007-10-01), Yoo et al.
patent: 2007/0246795 (2007-10-01), Fang et al.
patent: 2007/0257257 (2007-11-01), Cho et al.
patent: 2007/0268739 (2007-11-01), Yoo et al.
patent: 2007/0285965 (2007-12-01), Toda et al.
patent: 2007/0295950 (2007-12-01), Cho et al.
patent: 2008/0012064 (2008-01-01), Park et al.
patent: 2008/0014750 (2008-01-01), Nagashima
patent: 2008/0026547 (2008-01-01), Yin et al.
patent: 2008/0029754 (2008-02-01), Min et al.
patent: 2008/0029842 (2008-02-01), Symanczyk
patent: 2008/0048165 (2008-02-01), Miyazawa
patent: 2008/0049487 (2008-02-01), Yoshimura et al.
patent: 2008/0073635 (2008-03-01), Kiyotoshi et al.
patent: 2008/0080229 (2008-04-01), Choi et al.
patent: 2008/0102278 (2008-05-01), Kreupl et al.
patent: 2008/0157257 (2008-07-01), Bertin et al.
patent: 2008/0175031 (2008-07-01), Park et al.
patent: 2008/0185571 (2008-08-01), Happ et al.
patent: 2008/0232160 (2008-09-01), Gopalakrishnan
patent: 2008/0247219 (2008-10-01), Choi et al.
patent: 2009/0014706 (2009-01-01), Lung
patent: 2009/0014707 (2009-01-01), Lu et al.
patent: 2009/0085121 (2009-04-01), Park et al.
patent: 2009/0250681 (2009-10-01), Smythe et al.
patent: 2009/0267047 (2009-10-01), Sasago et al.
patent: 2009/0268532 (2009-10-01), De Ambroggi et al.
patent: 2009/0272960 (2009-11-01), Srinivasan et al.
patent: 2009/0316467 (2009-12-01), Liu
patent: 2009/0317540 (2009-12-01), Sandhu et al.
patent: 2010/0003782 (2010-01-01), Sinha et al.
patent: 2010/0065836 (2010-03-01), Lee
patent: 2010/0110759 (2010-05-01), Jin et al.
patent: 2010/0135061 (2010-06-01), Li et al.
patent: 2010/0163829 (2010-07-01), Wang et al.
patent: 2010/0193758 (2010-08-01), Tian et al.
patent: 2010/0193761 (2010-08-01), Amin et al.
patent: 2010/0193762 (2010-08-01), Hsieh et al.
patent: 2010/0232200 (2010-09-01), Shepard
patent: 101005113 (2006-12-01), None
patent: 101051670 (2007-04-01), None
patent: 101034732 (2007-09-01), None
patent: 1796103 (2006-09-01), None
patent: 2005175457 (2005-06-01), None
patent: 2006040981 (2006-02-01), None
patent: 2006-121044 (2006-05-01), None
patent: 2006121044 (2006-05-01), None
patent: 1020060087882 (2006-08-01), None
patent: 20070111840 (2007-11-01), None
patent: 20070118865 (2007-12-01), None
patent: WO 2006/003620 (2006-01-01), None
patent: PCT/US2008/084422 (2009-03-01), None
patent: WO 2009/127187 (2009-10-01), None
patent: WO 2010/068221 (2010-06-01), None
patent: PCT/US2008/084422 (2010-07-01), None
patent: WO 2010/082923 (2010-07-01), None
patent: WO 2010/082928 (2010-07-01), None
patent: WO 2010/085241 (2010-07-01), None
patent: WO 2010/087854 (2010-08-01), None
U.S. Appl. No. 12/114,096, filed May 2, 2008, Srinivasan et al.
U.S. Appl. No. 12/141,559, filed Jun. 18, 2008, Sandhu et al.
U.S. Appl. No. 12/166,604, filed Jul. 2, 2008, Sinha et al.
Baek et al., “Multi-layer Cross-point Binary Oxide Resistive Memory (OxRRAM) for Post-NAND Storage Application”, IEEE, 2005.
Chen et al., “Perovskite RRAM Devices with Metal/Insulator/PCMO/Metal Heterostructures”, IEEE, 2005, pp. 125-128.
Courtade et al., “Microstructure and resistance switching in NiO binary oxide films obtained from Ni oxidation”, IEEE, 2006, pp. 94-99.
Ho et al., “A Highly Reliable Self-Aligned Graded Oxide WOx Resistance Memory: Conduction Mechanisms and Reliability”, 2007 Symposium on VLSI Technology Digest of Technical Papers, pp. 228-229.
Karg et al., “Nanoscale REsistive Memory Device Using SrTiO3 Films”, IEEE, 2007, pp. 68-70.
Lee et al., “2-stack 1D-1R Cross-point Structure with Oxide Diodes as Switch Elements for High Density Resistance RAM Applications”, IEEE, 2007 pp. 771-774.
Lin et al., “Effect of Top Electrode Material on Resistive Switching Properties of ZrO2 Film Memory Devices”, IEEE, May 2007, vol. 28, No. 5, pp. 366-368.
Miyashita et al., “A Novel Bit-Line Process using Poly-Si Masked Dual

LandOfFree

Say what you really think

Search LandOfFree.com for the USA inventors and patents. Rate them and share your experience with other people.

Rating

Non-volatile resistive oxide memory cells, non-volatile... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Non-volatile resistive oxide memory cells, non-volatile..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Non-volatile resistive oxide memory cells, non-volatile... will most certainly appreciate the feedback.

Rate now

     

Profile ID: LFUS-PAI-O-4260290

  Search
All data on this website is collected from public sources. Our data reflects the most accurate information available at the time of publication.