Surface emitting semiconductor laser and method for...

Coherent light generators – Particular active media – Semiconductor

Reexamination Certificate

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C372S046010, C372S046013, C372S050110, C372S087000

Reexamination Certificate

active

08031755

ABSTRACT:
A surface emitting semiconductor laser includes: a substrate; a first semiconductor multilayer reflection mirror of a first conduction type; an active region; a second semiconductor multilayer reflection mirror of a second conduction type; a first selectively oxidized layer that is formed in one of the first and second semiconductor multilayer reflection mirrors and includes a first oxidized region selectively oxidized, and a first conductive region surrounded by the first oxidized region; and a second selectively oxidized layer that is formed in one of the first and second semiconductor multilayer reflection mirrors and includes a second oxidized region selectively oxidized, and a second conductive region surrounded by the second oxidized region. A first semiconductor layer next to the first selectively oxidized layer has an Al composition greater than that of a second semiconductor layer next to the second selectively oxidized layer, the first conductive region having a size smaller than that of the second conductive region.

REFERENCES:
patent: 6317446 (2001-11-01), Wipiejewski
patent: 2005/0100068 (2005-05-01), Jikutani et al.
patent: 2006/0007979 (2006-01-01), Jikutani et al.
patent: 2008/0187015 (2008-08-01), Yoshikawa et al.
patent: 2000-12974 (2000-01-01), None
patent: 2004-253408 (2004-09-01), None
patent: 2005-277309 (2005-10-01), None
patent: 2005-354038 (2005-12-01), None
patent: 2008-283028 (2008-11-01), None
Kent D. Choquette et al.,Advances in Selective Wet Oxidation of AIGaAs Alloys, IEEE Journal of Selected Topics in Quantum Electronics, vol. 3, No. 3, Jun. 1997, pp. 916-926.

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