Micro-electromechanical microshutter array

Details Micro-electromechanical microshutter array Micro-electromechanical microshutter array

2010-01-21

2011-12-13

Martinez, Joseph P (Department: 2873)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

Reexamination Certificate

active

08077372

ABSTRACT:
A microshutter array has a frame having a light transmissive portion. Linear microshutter elements extend across the light transmissive portion and in parallel to each other. Each microshutter element has a flat blade extended in a length direction and first and second torsion arms extending outwards from each side of the blade in the length direction, the blade extending across the light transmissive portion. There is at least one electrode associated with each linear microshutter element and extended in the length direction parallel to the microshutter element.

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